|
High Target Utilization - High Performance Magnetron Sputtering Sources,
Power Supplies and Accessories
We Provide Engineered Solutions - Exactly the Right Source for Your Process and System Needs Since 1992
|
High Utilization
Narrow Width Sources
 |
Ion™ DC Magnetron Sputtering Power
Supplies
with Advanced Arc Suppression
 |
|
Performance Characteristics
 |
SunSource™
Round Sources
 |
|
Kamlok™
Fast Target
Exchange System
 |
RF Power Supplies and
Sputtering Packages
 |
|
Linear/Rectangular Sources
 |
Polaris™ 2" & 3" Research Sources
 |
| 
