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Ion™ Series
DC Power Supplies
Ion™ 1500 DC Magnetron Power
Supply
 Ion™ Series DC Power Supplies Sales Brochure PS 700
11/19 Rev. I
Features
- Superior Arc Detection & Suppression -
< 100 nsecs (.1 µ
secs) Response Time - < 1 mJ Arc Energy
- 500
watt, 1000 watt & 1500 watt Output Power Versions
- Adjustable Arc Detection Delay & Off Time Before
Restarting
- Voltage, Current & Power Regulation Modes
- Adjustable Power Ramping
- Adjustable Run Timer
- Extremely Precise Resolution and Run to Run
Repeatability
- Stored Target Parameters for Up to 7 Separate
Targets
- kWHr Counting & Time Limit
- RS-232 & Analog Communication Capability
- Wide 0-1000 Volt Range Compared to 0-800 volts
Supplied by Competitors - Full Rated Power can be Applied Under Nearly all
Conditions
- Stable operation down to 20 watts for non-reactive
processes
- Suitable for use as a substrate bias power supply
up to 1000V
- Large Impedance Range - No Transformer Tap Changes Are Necessary to Operate
Across Entire Range
- Compact, low profile chassis -Saves rack space
- 2 Year Warranty
- CE, ETL/NRTL Compliant
Arc Damage is Virtually Eliminated When Arc Detection &
Suppression is Activated - Watch the Video
Click
here for Adobe Flash .swf files or
Click
here for Microsoft Media Player .mp4 files to download & play flash video of Ion™ 1500 and Polaris Source in Operation
-
still images from this video shown below
Hard arc on Al target in O2
environment on
3" Polaris™ source - no arc suppression
Same view & conditions as above, but with
plasma re-igniting - arcing is still decaying
Arc suppression of Ion™ 1500 working in same
environment & conditions - producing a stable
plasma & good target utilization with negligible
arc induced damage.
Specifications
|
Ion™
DC Magnetron Power Supplies |
 |
|
Input Frequency |
50 - 60 Hz |
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Input Phase |
1 phase |
|
Input Voltage |
100
- 250 VAC (lower VAC
may limit output) |
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Input Current |
13.7 amps maximum |
|
Power Factor |
> 0.98 |
|
Input Power Consumption |
1.75 kW |
|
Output Power |
1500 watts; 1000 watts;
500 watts |
|
Output Power @ 1000
volts |
1500 watts; 1000 watts;
500 watts |
|
Output Power @ 500 volts |
1500 watts; 1000 watts;
500 watts |
|
Output Power @ 200 volts |
800 watts; 600
watts; 400 watts |
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Output Power Resolution Compared to Setpoint - 500 to
1500 watts |
±1 watt |
|
Output Power Resolution Compared to Setpoint - 500 watts
or less |
± 0.5 watt |
|
Output Voltage (steady
state) |
1000 volts maximum |
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Output Voltage (strike) |
1000 volts maximum |
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Output Current (maximum) |
4 A (1500 watts); 3 A
(1000 watts); 2 A (500 watts) |
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Arc Detection Time |
< 100 nsecs (.1 µ secs) |
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Arc Energy |
< 1 mJ |
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Arc Detect Delay Time |
0.1 to 6500 µ secs
(adjustable) |
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Arc Out/Off Time |
0 (no arc handling) or
32 to 65000 µ secs (adjustable) |
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Arc Rate Counter |
Yes |
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Arc Recovery Time |
Set points will be
re-established < 200 µ secs after arc off time |
|
Line Regulation |
> 99% (includes load and
line variations over an arbitrary time interval) - aka < 1% |
|
Load Regulation |
> 99% (includes load and
line variations over an arbitrary time interval) - aka < 1% |
|
Power Ramping |
0.001 to 65 seconds
(adjustable) |
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Run Timer |
0.1 to 6553 seconds
(adjustable) |
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kWHr Counting |
Yes |
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kWHr Limit |
0 (limit shutdown
disabled) or 0.01 to 655 kWHr's |
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LED Display Accuracy |
1% |
|
Display Resolution |
0.1 watt, 1 volt, 0.001
amp (1 milliamp) |
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Stored Target
Information |
Stores parameter sets
for targets that can be re-installed after exchange. Saves P/V/I, ramp
time, run time, arc detect delay, arc off time, kWhr's for 7 separate
targets |
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Interlocks |
1 each |
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Temperature
Monitoring/Protection |
Yes. “Fan on Demand”
cooling with thermal shutdown protection. |
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Dimensions |
48.3 cm/19" x 47.6
cm/18.75" x 4.44 cm/1.75" (1 U Rack Height) |
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Weight |
8.2 kG/18 pounds |
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RS-232/Analog Interfaces |
Yes |
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DC Bias Operation |
Basic open circuit
operation between 1000 volts to < 100 volts |
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Output Power Connector |
Female HN |
| |
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Ordering Information |
Contact Factory or refer to
Ion™ DC Magnetron
Power Supplies Ordering
Information |
Complete
Sputtering Packages
Polaris GEN II 2" & 3" Research Sputtering
Sources
used in combination with the Ion™ 1500 allow performance
not possible with any other sputtering source & DC power
supply - for example:
- Sputter 1/4" [6,35 mm] thick Ni targets
- Deposit insulating films from metallic targets
without the use of expensive power supplies in an essentially arc-damage free environment
- Achieve superior target utilization
- Apply virtually full rated output of power
supply to source across broad pressure range
- Deposit very thin films at extremely low power
levels
Accessories
Blocking filters
(required when the Ion™ DC Magnetron Power Supply
is used simultaneously with an RF Power Supply) and
switches that allow the sequential use of multiple sputtering
sources from a single power supply are available.
DC Pass/RF Blocking Filter Installed on
Output of Ion™ 1500
Power supply
switches allow 1 each Ion™ DC Magnetron Power Supply
to be switched between 2,3, or 4 sputtering sources or for 2 each power
supplies (either 1 or 2 Ion™ DC Magnetron Power Supplies or RF power
generation system - can be one of each type) to be switched. One input to
two outputs for each power supply. Can be controlled from the users
system controller or from a separate, stand-alone controller.
Two Power Supply Input, 4 Output (2 Outputs per Input) DC/RF
Switch
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