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Application Notes:
  Grounding of High Power DC Sputtering Power
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Drawings & Specifications - Sputtering Sources:
  Installation Control Drawings - Round Flange
    Mount Magnetron Sputtering Sources
  Installation Control Drawings - Round Internal
    Mount Magnetron Sputtering Sources
  Installation Control Drawings - Linear/Rectangular
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    Internal Mount Magnetron Sputtering Sources

  Target Fabrication & Bonding Specifications: 
     Round Sputter Sources
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   Target Fabrication Drawings - Round Sputter
     Sources

Drawings - Power Supplies and Accessories

Frequently Asked Questions
  Magnetron Sputtering Sources

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  Magnetron Sputtering Sources:
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  PolarisDC Sputterng Packages
  PolarisRF Sputtering Packages
  SunSourceLinear Sputtering Sources

  SunSourceRound Sputtering Sources

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 Magnetron Sputtering Sources

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    Drawings:
      Installation
      Target Fabrication
      Target Fabrication & Bonding Specifications
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  SunSource Sputtering Sources
    Drawings:
      Installation - Round Flange Mount
      Installation - Round Internal Mount
      Installation - Linear/Rectangular Flange Mount
      Installation - Linear/Rectangular Internal Mount
      Target & Backing Plate Fabrication & Bonding
       Specifications - Round
      Target & Backing Plate Fabrication & Bonding
       Specifications - Rectangular
    Frequently Asked Questions
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   Ordering Information - Round
   Ordering Informaton - Linear/Rectangular
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   Technical References

 

Power Supplies and Components

Ion™ DC Magnetron Power Supplies
  Sales Literature
 
Ion 1500 DC Power Supplies

  Ordering Information
  Ion 1500 DC Power Supplies

 
  Power Supply Accessories
  DC Pass/RF Blocking Filters
  RF/DC Power Supply Switches

  Drawings - Power Supplies and Accessories
 

RF Power Supplies and Matching Networks
  Sales Literature
  RF Power Supplies & Matching Networks


  Power Supply Accessories
  RF/DC Power Supply Switches

  Drawings - Power Supplies and Accessories

  Ordering Information
  RF Power Supplies, Matching Networks & Accessories

 

 

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Last modified: 02 January 2014