A 13.56 MHz power generator packaged in a 19" 1/2 rack configuration and a separate impedance matching network are provided.  This allows the matching network to be located as close to the sputtering source or plasma load as possible.  This is highly desirable and minimizes many problems like high reflected power, power cable overheating and burn-throughs and other unsafe conditions.  Short cables are good.  The impedance matching network provides the user with a broad tuning range.  The impedance matching network is configured to enable it to match a wide range of impedances.  The RF generator allows precise control from the front panel or via a rear panel analog or optional RS-232 interface.  Power and tuning (capacitor) adjustment are accomplished either through knobs on the manual tuning network (forward and reflected power are read on the power generator front panel) or adjusted and read on the automatic matching network controller front panel or on the users sytem controls through the analog or optional RS-232 interface.

A set-point potentiometer allows the operator to set and vary Forward/Incident RF Power.  Digital meters display Forward and Reflected/Reflectant Power developed on the source.  The external control interface on the back of the unit allows the power generator to be controlled by the user's programmable controller or computer.  LED indicators provide visual indications of the status of safety and functional interlocks.  The power generation system incorporates high efficiency switch mode power supplies and solid-state technology.  They are very robust and can accept 30% reflected power before they operate in fold-back mode.

Power Supply  

AC Mains Input

110-240 VAC,  Single Phase, 50/60 Hz, 5.5A  (550 watts) maximum

RF Output Power

0-300 watts into a 50 ohm load

Output Frequency

13.56 MHz ± .005%

Output Impedance

50 W resistive

Output Connector

Female N to Matching Network (8 foot long RG-213 cable supplied when complete power generation system is purchased)

Output Power Stability

± .5% of set point

Cooling

Forced air via a 145 cfm fan

Operating Environment

Maximum 90% relative humidity.  15-40° C (59-104° F) ambient temperature

Size – Rack Mount Power Supply

9.5" wide (with supplied rack mounting ears) x 5.5” high 1/2 Rack Mount Panel x 16” Deep (14.0 cm x 19.1 cm x 39.4 cm)

Weight

Nominal 14 pounds (6.4 kg)

Power Supply  

AC Mains Input

110-240 VAC,  Single Phase, 50/60 Hz, 5.5A  (550 watts) maximum

RF Output Power

0-600 watts into a 50 ohm load

Output Frequency

13.56 MHz ± .005%

Output Impedance

50 W resistive

Output Connector

Female N to Matching Network (8 foot long RG-213 cable supplied when complete power generation system is purchased)

Output Power Stability

± .5% of set point

Cooling

Forced air via a 145 cfm fan

Operating Environment

Maximum 90% relative humidity.  15-40° C (59-104° F) ambient temperature

Size – Rack Mount Power Supply

8" wide (9.5" wide with supplied rack mounting ears) x 7.0” high 1/2 Rack Mount Panel x 19” Deep (20.3 cm x 17.8 cm x 48.8 cm)

Weight

Nominal 22 pounds (10 kg)

Automatic Impedance
Matching Network

RF Output Connector

Female HN Coaxial Cable Connector Standard (N type or stud optional)

RF Input Connector

Female N Connector from Power Supply (8' long RG-213 cable supplied)

Circuit Topology

“L” network configuration using an air variable load capacitor and vacuum capacitor

Output Impedance

Wide range.  Will match sputtering source over entire normal pressure range of operation.

Output Cable (sold separately)

36” long RG-393 cable with Male HN Coaxial Connectors both ends recommended. Cables longer than 72" should not be used to minimize reflected power and cable heating.

AC Mains Input

100-240 VAC,  Single Phase, 50/60 Hz, 2A maximum

RF Output Connector

Female HN Coaxial Cable Connector

RF Input Connector

Female N Connector from Power Supply (8' long RG-213 cable supplied)

Circuit Topology

“L” network configuration using an air variable load capacitor and vacuum capacitor

Output Impedance

Wide range.  Will match sputtering source over entire normal pressure range of operation.

Output Cable (sold separately)

36” long RG-393 cable with Male HN Coaxial Connectors both ends recommended. Cables longer than 72" should not be used to minimize reflected power and cable heating.

Automatic Impedance
Matching Network

RF Output Connector

Female HN Coaxial Cable Connector Standard (N type or stud optional)

RF Input Connector

Female N Connector from Power Supply (8' long RG-213 cable supplied)

Circuit Topology

“L” network configuration using an air variable load capacitor and vacuum capacitor

Output Impedance

Wide range.  Will match sputtering source over entire normal pressure range of operation.

Output Cable (sold separately)

36” long RG-393 cable with Male HN Coaxial Connectors both ends recommended. Cables longer than 72" should not be used to minimize reflected power and cable heating.

AC Mains Input

100-240 VAC,  Single Phase, 50/60 Hz, 2A maximum

Automatic Impedance
Matching Network

RF Output Connector

Female HN Coaxial Cable Connector Standard (N type or stud optional)

RF Input Connector

Female N Connector from Power Supply (8' long RG-213 cable supplied)

Circuit Topology

“L” network configuration using an air variable load capacitor and vacuum capacitor

Output Impedance

Wide range.  Will match sputtering source over entire normal pressure range of operation.

Output Cable (sold separately)

36” long RG-393 cable with Male HN Coaxial Connectors both ends recommended. Cables longer than 72" should not be used to minimize reflected power and cable heating.

AC Mains Input

100-240 VAC,  Single Phase, 50/60 Hz, 2A maximum