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 Round Internal Mount Magnetron Sputtering Sources
Installation, Interface Control Drawings & Drawing Blocks
 4 Inch SunSource™ Magnetron Sputtering Source
with Ground Shield/Anode Removed. All water, power
and gas connections are made at atmosphere within vacuum feedthrough. Drawing Blocks are in native AutoCAD
2000 .dwg format and zipped to allow download.
They may be inserted directly into the users system drawing when designing a new system or retrofitting an existing system.
Basic Source Only
 Drawing 00001025.pdf 4" Internal Mount SunSource™
GEN II Sputter Source
 AutoCAD 2000i .dwg Drawing Block - Side View (zipped file)
AutoCAD 2000i .dwg Drawing Block - Bottom View (zipped file)
Drawing 00002130, Rev.B.pdf 6" Internal SunSource™
GEN II Sputter Source
AutoCAD 2000i .dwg Drawing Block - Side View (zipped file)
AutoCAD 2000i .dwg Drawing Block - Bottom View (zipped file) Drawing 00000178D.pdf 6" Internal SunSource™ Sputter Source
- Legacy Design
AutoCAD 2000i .dwg Drawing Block - Side View (zipped file)
AutoCAD 2000i .dwg Drawing Block - Bottom View (zipped file)
Drawing 00002144,
Rev. C.pdf 8" Internal SunSource™
GEN II Sputter Source
AutoCAD 2000i .dwg Drawing Block - Side Views (zipped file)
AutoCAD 2000i .dwg Drawing Block - Bottom View (zipped file)
With Feedthrough Assemblies and Options
Drawing 00001029.pdf 4" Internal Mount SunSource™
GEN II Sputter Source - 1" Baseplate Feedthrough
AutoCAD 2000i .dwg Drawing Block - Side View (zipped file)
AutoCAD 2000i .dwg Drawing Block - Bottom View (zipped file) Drawing 00001042.pdf 4" Internal Mount SunSource™
GEN II Sputter Source - 32,5mm Baseplate Feedthrough
Drawing 00002953.pdf 4" Internal Mount SunSource™
GEN II Sputter Source - With Shutter
Drawing 00002852.pdf 4" Internal Mount SunSource™
GEN II Sputter Source - 3/4" OD Tube Variable Position with Shutter- 1" Baseplate Feedthrough
Drawing 00004001.pdf 4" Internal Mount SunSource™
GEN II Sputter Source - 3/4" OD Tube Variable Position with Tilt- 1" Baseplate Feedthrough
Drawing 00001044.pdf 4" Internal Mount SunSource™
GEN II Sputter Source - 3/4" OD Tube Variable Position with Tilt and
Shutter- 1" Baseplate Feedthrough
Drawing 00001088, Rev. A.pdf 4" Internal Mount SunSource™
GEN II Sputter Source - 1" OD Tube RF/DC Feedthrough
Drawing 00002492.pdf 4" Internal Mount SunSource™
GEN II Sputter Source - 1.0" OD Tube Variable Position with Tilt and
Shutter
Drawing 00002473.pdf 4" Internal Mount SunSource™
GEN II Sputter Source - 1.5" OD Tube with Tilt and Shutter
Drawing 00002598.pdf 4" Internal Mount SunSource™
GEN II Sputter Source - 1.5" OD Tube, Variable Position with Tilt and Shutter on 4" ASA Flange
Drawing 00002592.pdf 6" Internal Mount SunSource™
GEN II Sputter Source - with Shutter
Drawing 00002703A.pdf 6" Internal Mount SunSource™
GEN II Sputter Source - 1-5" OD Tube Variable Position Feedthrough
Drawing 00002376.pdf 6" Internal Mount SunSource™
GEN II Sputter Source - 1-5" OD Tube Variable Position Feedthrough and Tilt
Drawing 00002860.pdf 6" Internal Mount SunSource™
GEN II Sputter Source - 1-5" OD Tube Variable Position Feedthrough with
Shutter and Tilt
Drawing 00002570.pdf 8" Internal Mount SunSource™
GEN II Sputter Source - with Shutter
Drawing 00002145,
Rev. A.pdf 8" Internal SunSource™
GEN II Sputter Source - 1.5" OD Tube Feedthrough and Tilt
AutoCAD 2000i .dwg Drawing Block - Side View
1 - Tube Only (zipped file)
AutoCAD 2000i .dwg Drawing Block - Side View
2 - Tube Only (zipped file)
AutoCAD 2000i .dwg
Drawing Block - Side View - 30° Tilt Angle - Tube Only (zipped file)
AutoCAD 2000i .dwg Drawing Block - Side View
1 - HN Power Connector (zipped file)
AutoCAD 2000i .dwg Drawing Block - Side View
2 - HN Power Connector (zipped file)
AutoCAD 2000i .dwg
Drawing Block - Side View - 30° Tilt Angle - HN Power Connector (zipped file)
Feedthrough Assemblies Only
Drawing 000002859.pdf
Adaptor Kit, KF-50 to 1.5" OD Tube Compression Fitting
Drawing 00000270A.pdf X-Y-X Adjustable Positioning Feedthrough Assembly
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