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SunSource GEN II
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Drawings, Specifications & Manuals

 

Installation Drawings - Round

2" & 3" Diameter Polaris™ Sputtering Sources

4" Diameter & Larger Round Internal Mount SunSource™ Sputtering Sources

4" Diameter & Larger Round Flange Mount SunSource™ Sputtering Sources

 

 

Installation Drawings - Linear/Rectangular

 

Linear/Rectangular Internal Mount SunSource™ Sputtering Sources

Linear/Rectangular Flange Mount SunSource™ Sputtering Sources

 

 

 

 

Target, Backing Plate & Bonding Requirements

BondedTargets_Group_Spec.jpg (23671 bytes)Link to Target, Backing Plate & Bonding Requirements

 

Power Supplies, Filters and Switches

 

DC Magnetron Power Supplies.
13.56 MHz RF Power Supplies and Impedance Matching Networks.
DC Pass/RF BlockingFilters.
RF and DC Power Supply Switches.

 

 

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Last modified: 02 January 2014