GEN II
Linear Internal Mount Sputtering Sources
Installation & Interface Control Drawings
STANDARD MOUNTING (UTILITY CONNECTIONS THROUGH REAR FLANGE) CONFIGURATIONS
Short Internal Mount SunSource GEN II™
with single KF-50 bulkhead flange
Internal Mount with Single Feedthrough Flange
90mm Wide
Drawing 00000966,Rev. E.pdf 90mm Wide Internal Mount SunSource GEN II™ Sputter Source with Kamlok™
5" Wide
Drawing 00000961, Rev. B.pdf 5" Wide Internal Mount SunSource GEN II™ Sputter Source with Kamlok™
Long Internal Mount SunSource GEN II™
with dual ISO-63 bulkhead flanges - High Power
Internal Mount with Two Feedthrough Flanges
90mm Wide
Drawing 00001052.pdf 90mm Wide
Internal Mount SunSource GEN II™ Sputter Source with Kamlok™
5" Wide - Short Lengths
Drawing 00000949, Rev. B.pdf 5" Wide Internal Mount SunSource GEN II™ Sputter Source - with Kamlok™
5" Wide - Longer Lengths and Higher Power
Drawing 00002450.pdf "Long" 5" Wide Internal Mount SunSource GEN II™ Sputter Source
- with Kamlok™
6" Wide - Short Lengths
Drawing 00002625.pdf 6" Wide Internal Mount SunSource GEN II™ Sputter Source with Kamlok™
6" Wide - Longer Lengths and HIgher Power
Drawing 00002253.pdf 6" Wide Internal Mount SunSource GEN II™ Sputter Source with Kamlok™
INTERNAL MOUNT WITH ATMOSPHERIC UTILITY HOUSING
Small profile Internal Mount SunSource GEN II™
with Atmospheric Utility Housing
90mm Wide
CANTILEVER MOUNT (UTILITY CONNECTIONS THROUGH END OF SOURCE) CONFIGURATIONS
Small Internal Cantilever Mount SunSource GEN II™
with
single KF-50 quick clamp flange
Internal Cantilever Mount
90mm Wide
| Contact factory if the information you need is not presently available online. Interface Control Drawings for our entire range of internal mount sources are constantly being updated |
