Application Note AN 000 101 11/06 - "Grounding of High Power DC Sputtering Power Systems"

 

  Application Note AN 000 102 05/10 - "Distribution Uniformity Guidelines for SunSource™ Linear Sputtering Sources Used in "Pass-By"
  or Rotating Drum Systems"
 

  Application Note AN 000 104 08/12 - "Cooling Water Quality"

These texts may be purchased by clicking on the associated hyperlinks.  Most of them, including out of print or limited availability editions can also be obtained through amazon.com.

Recommended Reading

ASM Handbook, Volume 5, Surface Engineering, ASM International, Materials Park, OH, 1994.  ISBN 0-87170-384-X

Raymond L. Boxman, Philip J. Martin and David M. Sanders, Eds, Handbook of Vacuum Arc Science and Technology “Fundamentals and Applications”, Noyes Publications, Park Ridge, NJ, 1995.  ISBN 0-8155-1375-5.

Brian Chapman, Glow Discharge Processes, John Wiley and Sons, New York, New York, 1980. 
ISBN 0-471-07828-X.

Leonard C. Feldman and James. W. Mayer, Fundamentals of Surface and Thin Film Analysis, Elsevier Science Publishing Co., Inc., New York, New York, 1986.   ISBN 0-444-00989-2

Maurice H. Francombe, John L. Vossen, Eds., Plasma Sources for Thin Film Deposition and Etching, Volume 18, Academic Press, San Diego, CA, 1994.  ISBN 0-12-533018-9.

Leon I. Maissel and Reinhard Glang, Eds., Handbook of Thin Film Technology, McGraw-Hill, New York, New York,  1970.  Library of Congress Catalog Card No. 73-79497.

John F O'Hanlon, A User's Guide to Vacuum Technology, 2nd Edition, Wiley-Interscience, New York, New York, April 24, 1989, ISBN: 0-47-181242-0 

Stephen M. Rossnagel, Jerome J. Cuomo and William D. Westwood, Eds., Handbook of Plasma Processing Technology, Noyes Publications, Park Ridge, New Jersey, 1990.  ISBN 0-8155-1220-1.

J. Reece Roth, Industrial Plasma Engineering, Volume 1 “Principles”, Institute of Physics Publishing, Bristol, UK and Philadelphia, PA, 1995, ISBN 0-7503-0317-4

Donald L. Smith, Thin Film Deposition Principles & Practice, McGraw-Hill, New York, NY, 1995.  ISBN 0-07-058502-4.

R. V. Stuart, Vacuum Technology, Thin Films and Sputtering, Academic Press, Orlando, FL, 1983.  ISBN 0-12-673780-6

John Vossen and Werner Kern, Eds., Thin Film Processes, Academic Press, New York, New York, 1978.  ISBN 0-12-728250-5.

John L. Vossen and Werner Kern, Eds., Thin Film Processes II, Academic Press, San Diego, CA, 1991.  ISBN 0-12-728251-3

Kiyotaka Wasa and Sahigeru Hayakawa, Handbook of Sputter Deposition Technology, Noyes Publications, Park Ridge, New Jersey, 1992.  ISBN 0-8155-1280-5.

Application Note – Grounding of High Power DC Sputtering Power Systems