The Polaris™ 300/600 packages are intended for those wishing to spend the least amount of money possible for the maximum possible performance and flexibility.  The user simply selects the desired sputtering source configuration, automatic vs. manual impedance matching and from a limited number of options (RS-232 interface and common exciter if two or more sources will be run simultaneously with RF power).  Common, typical packages are listed and can be found by clicking here.  An RF power blocking/DC power pass filter will be required if two or more sources are two be run by DC and RF power to protect the DC power supply from damage.

Everything required to install the Polaris™ internally mounted sputtering source into the users system and connect it with the power generation system is supplied.  Included is one of a series of standard feedthrough or flange mounted assemblies, all necessary electrical, water, gas and vacuum hardware and a 3' long shielded cable between the feedthrough assembly and the power supply/matching network.  A comprehensive documentation package is provided.  Other feedthrough arrangements and cable lengths are possible - please consult the factory.

A 300 or 600 watt 13.56 MHz power generator packaged in a 19" 1/2 rack configuration and a separate impedance matching network is provided.  This allows the matching network to be located as close to the sputtering source as possible.  This is highly desirable and minimizes many problems like high reflected power, power cable overheating and burn-throughs and other unsafe conditions.  Short cables are good.  The impedance matching network provides the user with a broad tuning range.  The impedance matching network is configured to enable it to match a wide range of impedances.  The RF generator allows precise control from the front panel or via a rear panel analog or optional RS-232 interface.  Power and tuning (capacitor) adjustment are accomplished either through knobs on the manual tuning network (forward and reflected power are read on the power generator front panel) or adjusted and read on the automatic matching network controller front panel or on the users sytem controls through the analog or optional RS-232 interface.

A Set-point potentiometer allows the operator to set and vary Forward/Incident RF Power.  Digital meters display Forward and Reflected/Reflectant Power developed on the source.  The external control interface on the back of the unit allows the power generator to be controlled by the user's programmable controller or computer.  LED indicators provide visual indications of the status of safety and functional interlocks.  The power generation system incorporates high efficiency switch mode power supplies and solid-state technology.  They are very robust and can accept 30% reflected power before they operate in fold-back mode.

Sputtering Source

Polaris™ GEN II Sputtering Source or Assembly

Target Size

2" or 3" Diameter

Feedthroughs & Mounting Flanges

Refer to Polaris™ Interface Control Drawings

AC Mains Input

110-240 VAC,  Single Phase, 50/60 Hz, 5.5A  (550 watts) maximum

RF Output Power

0-300 watts or 0-600 watts into a 50 ohm load

Output Frequency

13.56 MHz ± .005%

Output Impedance

50 W resistive

Output Connector

Female N to Matching Network (8 foot long RG-213 cable supplied)

Output Power Stability

± .5% of set point

Cooling

Forced air via a 145 cfm fan

Operating Environment

Maximum 90% relative humidity.  15-40° C (59-104° F) ambient temperature

Size – Rack Mount Power Supply

300 watts
9.5" wide (with supplied rack mounting ears) x 5.5” high 1/2 Rack Mount Panel x 16” Deep (14.0 cm x 19.1 cm x 39.4 cm)
600 watts

Weight

300 watts: Nominal 14 pounds (6.4 kg)

Automatic Impedance Matching Network

RF Output Connector

Female HN Coaxial Cable Connector

RF Input Connector

Female N Connector from Power Supply (8' long RG-213 cable supplied)

Circuit Topology

“L” network configuration using an air variable load capacitor and vacuum capacitor

Output Impedance

Wide range.  Will match sputtering source over entire normal pressure range of operation.

Output Cable Supplied

36” long RG-393 cable with Male HN Coaxial Connectors both ends supplied as standard. Cables longer than 72" should not be used to minimize reflected power and cable heating.

AC Mains Input

100-240 VAC,  Single Phase, 50/60 Hz, 2A maximum

RF Output Connector

Female HN Coaxial Cable Connector

RF Input Connector

Female N Connector from Power Supply (8' long RG-213 cable supplied)

Circuit Topology

“L” network configuration using an air variable load capacitor and vacuum capacitor

Output Impedance

Wide range.  Will match sputtering source over entire normal pressure range of operation.

Output Cable Supplied

36” long RG-393 cable with Male HN Coaxial Connectors both ends supplied as standard. Cables longer than 72" should not be used to minimize reflected power and cable heating.

Ordering Information

Contact factory or refer to Polaris™ Ordering Information for a complete list of possible packages.