Round Sputtering Sources, Spare Parts & Accessories
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SCOPE OF DELIVERY - INTERNAL MOUNT
- One target backing plate (thickness must be specified when ordering)
- One target clamping ring (type and target thickness must be specified when ordering
- Adjustable height ground shield to accommodate different combined target/backing plate thicknesses
- Two each 60” long polypropylene water lines
- One each 36” long argon gas line and union
- 304 CRES KF-50 bulkhead clamp assembly
- 304 CRES KF-50 centering ring assembly with viton o-ring
- Documentation set on CD including: instruction manual, interface control drawing, assembly drawing, target, backing plate and target bonding specifications and drawings, magnet module field profiles
- Spare Parts Kit, including o-rings, fasteners, washers, screw insulators and end caps, water fitting compression sleeves.
SCOPE OF DELIVERY - FLANGE MOUNT
- As above, with the addition of protective electrical cap to prevent accidental exposure to high
voltage. The KF-50 bulkhead clamp used to retain the cap is Al 6061 instead of 304 CRES.
SPARE PARTS & CONSUMABLES
The parts noted here are for the current version of the source. Legacy parts are available by contacting the factory.
| SIZE | PART NUMBER | DESCRIPTION | SALES BROCHURE |
| Sputtering Sources | |||
| 4" | 00001026 | 4” Internal Mount Cathode with KF-50 Flange | MC 300 05/98 |
| 4" | 00000768 | 4” Flange Mount Cathode - ISO 160 Flange | MC 300 05/98 |
| 6" | 00000158 | 6” Internal Mount Cathode with KF-50 Flange | MC 300 05/98 |
| 6" | 00001000 | 6” Flange Mount Cathode - ISO 200Flange | MC 300 05/98 |
| 8" | 00000416 | 8” Internal Mount Cathode with KF-50 Flange | MC 300 05/98 |
| 8" | 00000600 | 8” Flange Mount Cathode - ISO 250 Flange | |
| Feedthrough Kits | |||
| 4"-8" | 00000270 | X-Y-Z Feedthrough Assembly | MC 300 05/98 |
| Vacuum Hardware | |||
| 00000322 | 304 CRES KF-50 Bulkhead Clamp Assembly with Vented Screws (does not include centering ring) | ||
| 00000100-4 | 304 CRES KF-50 Centering Ring with Viton O-Ring | ||
| Target Backing Plates | |||
| 4" | 00001000-1 | 0.125" thick copper backing plate - GEN II Only - Prior Versions have different bolt pattern. Call factory for old P/N's. | |
| 4" | 00001000-2 | 0.188" thick copper backing plate - GEN II Only- Prior Versions have different bolt pattern. Call factory for old P/N's. | |
| 4" | 00001000-3 | 0.250" thick copper backing plate - GEN II Only- Prior Versions have different bolt pattern. Call factory for old P/N's. | |
| 6" | 00000023-1 | 0.125" thick copper backing plate | |
| 6" | 00000023-2 | 0.188" thick copper backing plate | |
| 6" | 00000023-3 | 0.250" thick copper backing plate | |
| 8" | 00000118-1 | 0.125" thick copper backing plate | |
| 8" | 00000118-2 | 0.188" thick copper backing plate | |
| 8" | 00000118-3 | 0.250" thick copper backing plate | |
| Target Clamping Rings | |||
| 4" | 00000337-1 | 0.125" thick bonded targets - GEN II Only- Prior Versions have different bolt pattern. Call factory for old P/N's. | |
| 4" | 00000337-2 | 0.188" thick bonded targets - GEN II Only- Prior Versions have different bolt pattern. Call factory for old P/N's. | |
| 4" | 00000328-1 | 0.250" thick bonded targets - GEN II Only- Prior Versions have different bolt pattern. Call factory for old P/N's. | |
| 4" | 00000338-1 | 0.125" thick clamped targets - GEN II Only- Prior Versions have different bolt pattern. Call factory for old P/N's. | |
| 4" | 00000338-2 | 0.188" thick clamped targets - GEN II Only- Prior Versions have different bolt pattern. Call factory for old P/N's. | |
| 4" | 00000299 | 0.250" thick clamped targets - GEN II Only- Prior Versions have different bolt pattern. Call factory for old P/N's. | |
| 4" | 00001022 | 0.375" thick directly water cooled targets - GEN II Only - Prior Versions have different bolt pattern. Call factory for old P/N's. | |
| 4" | 000001023 | 0.250" thick directly water cooled targets - GEN II Only- Prior Versions have different bolt pattern. Call factory for old P/N's. | |
| 6" | 00000019-1 | 0.250" thick bonded targets | |
| 6" | 00000019-2 | 0.375" thick bonded targets | |
| 6" | 00000021-1 | 0.250" thick clamped targets | |
| 6" | 00000021-2 | 0.500" thick clamped targets | |
| 6" | 00000021-3 | 0.625" thick clamped targets | |
| 6" | 00000159-1 | 0.375" thick directly water cooled targets | |
| 6" | 00000159-2 | 0.500" thick directly water cooled targets | |
| 6" | 00000159-3 | 0.625" thick directly water cooled targets | |
| 8" | 00000119-1 | 0.250" thick bonded targets | |
| 8" | 00000119-2 | 0.375" thick bonded targets | |
| 8" | 00000119-3 | 0.500" thick bonded targets | |
| 8" | 00000152-4 | 0.250" thick clamped targets | |
| 8" | 00000152-1 | 0.375" thick clamped targets | |
| 8" | 00000152-2 | 0.500" thick clamped targets | |
| 8" | 00000152-3 | 0.625" thick clamped targets | |
| 8" | 00000121-4 | 0.250" thick directly water cooled targets | |
| 8" | 00000121-1 | 0.375 thick directly water cooled targets | |
| 8" | 00000121-2 | 0.500" thick directly water cooled targets | |
| 8" | 00000121-3 | 0.625" thick directly water cooled targets | |
| Insulators | |||
| 4" | 00000872 | Insulator Washer - Ultem | |
| 4" | 00000869 | Insulator Seal - Ultem | |
| 6"-8" | 00000025 | Body Insulator - Ultem (old style was Teflon) | |
| 6"-8" | 00000028 | Bolt Insulator Cap - Teflon | |
| 6"-8" | 00000029 | Bolt Insulator - Glass Filled Teflon | |
| Ground (Anode) Shields | |||
| 4" | 00001031 | Side Ground Shield, Internal Mount | |
| 4" | 00001004 | Side Ground Shield, Flange Mount | |
| 4" | 00001005 | Top Ground Shield | |
| 6" | 00000027-1 | Side Ground Shield, Internal Mount | |
| 6" | Side Ground Shield, Flange Mount | ||
| 6" | 00000024-1 | Top Ground Shield | |
| 8" | 00000122-1 | Side Ground Shield, Internal Mount | |
| 8" | Side Ground Shield, Flange Mount | ||
| 8" | 00000140-1 | Top Ground Shield | |
| Magnet Modules | |||
| 4" | 00000695 | 4 Inch Magnet Module | |
| 6" | 00002469 | 6 Inch Magnet Module (Old Part Number 00000169-1) | |
| 8" | 00000324-1 | 8 Inch Magnet Module | |
| Water Fitting | |||
| 4" | 00000658-3 | Push-to-Connect Straight Union, 3/8" O.D Polyethylene Tubing | |
| 6-8" | 00000168 | 304 CRES Water Fitting Assembly, 1/2" O.D., 3/8" ID Polyethylene Tubing. | |
| 6-8" | 00000155 | Delrin Compression Sleeve for P/N 00000168 Water Fitting Assembly | |
| 6-8" | 00000153-016 | Viton O-Ring for P/N 00000168 Water Fitting Assembly Face Seal | |
| 6-8" | 00000064 | Brass Hex Nut for P/N 00000168 Water Fitting Assembly | |
| Gas Fitting | |||
| 6-8" | 00000703 | 316 CRES Gas Fitting Assembly with 1/8" O.D. Swagelok Fitting | |
| 6-8" | 00000153-010 | Viton O-Ring for P/N 00000703 Gas Fitting Assembly Face Seal |
